Introduction:

Ellipsometry is well known measurement tool in semiconductor industry. Ellipsometers applied there detect polarization changes in reflected light of (flat) targets. Thus, layer thickness and refraction index of the target material then can be calculated on base of standard mathematical procedures.

Our papers here report remarkable enhancement of standard reflection ellipsometry. We prove by theory and experiment that as well surface topology as material distribution of arbitrary (non-flat) targets can be measured simultaneously by using modified reflection ellipsometry. We call this novel measurement procedures Scanning Ellipso-Topometry and Image Processing Ellipso-Topometry, respectivily.

Scanning Topometer: Beam focusing and scanning must be applied to get the wanted high lateral resolution of the surface under test. The math applied is based on Stokes formalism and optimal filtering of local slope data to yield the surface height data.

Image Processing Topometer: Targets with straying surfaces must be treated with the Stokes-Mueller formalism. Furthermore, for rapid detection of the whole target surface usability of image processing ellipso-topometry is tested. Theory and convincing first measurement results of both topometers are presented/discussed in detail in the following papers.

Theory and convincing first measurement results of both topometers are presented/discussed in detail in the following papers.

SURFACE MEASUREMENT, TOPOGRAPHY, MATERIAL DISTRUBUTION - OBERFLÄCHENMESSTECHNIK, TOPOGRAPHIE , MATERIALVERTEILUNG

Holzapfel, W. ; Baetz, W., Saber, M.

Zur Detektion von Oberflächentopologie und Materialverteilung auf Grundlage des Stokes-Mueller-Formalismus - Detection of surface topology and material distribution based on Stokes-Mueller formalism. 
IMAT Research Report MT-16 (ISSN 0939-5628), University of Kassel, Germany 2006

Wolfgang Holzapfel

Bildhafte Spektralellipsometrie zur simultanen Erkennung von material- und formbedingten Oberflächenstrukturen (Bildhafte Oberflächen-Ellipsometrie)
Abschlussbericht zum DFG-Forschungsprojekt Geschäftszeichen: Ho 1212/6-1  Kassel 2006

Saber, N.; Baetz, W.; Holzapfel, W.:

Simultaneous Measurement of Surface Topology and Material Distribution by Polarization Detection
Proceedings SPIE Optical Measurement Systems for Industrial Inspection III, June 23-26 2003, Munich, Germany, Vol. 5144, pp. 197 – 205, ISBN 0-8194-5014-6

Holzapfel, W.; Neuschaefer-Rube, U.

Simultaneous Measurement of Surface Geometry and Material Distribution by focusing Ellipso-Topometry.
Applied Optics, 41, 22, pp. 4526-4535, 2002

Neuschaeffer-Rube, U.; Holzapfel, W.; Wirth, F.

Surface measurement applying focussing reflection ellipsometry –configurations and error treatmen. 
Measurement 33, 2003, pp. 163-171

Holzapfel, W.; Neuschaefer-Rube, U.; Sofsky, M.:

Optical Topography measurement applying optimal filtering of local slope and surface height data.
Optical Engineering 41, 9 pp. 2301-2309, September 2002

Neuschaefer-Rube, U.; Holzapfel, W.; Wirth, F.

Target Analysis by focusing ellipsometry.
Proceedings of XVI IMEKO World Congress, Sep. 25-28, 2000, Vienna, Austria, Vol. II: Education and Training in Measurement and Instrumentation, Photonic Measurement, Micro and Nano Technology, pp. 249-254, ISBN 3-901888-04-7

Holzapfel, W.; Neuschaefer-Rube, U.; Doberitzsch, J., Wirth, F.

Präzise Strukturmeßtechnik mit lasergestützter Mikroellipsometrie.
tm Technisches Messen 66, 11 (1999), pp. 455-462, ISSN 01718096

Holzapfel, W.; Neuschaefer-Rube,U.; Doberitzsch, J.

Measurement of Surface Topography and Material by Micro-Ellipsometry
Proceedings of IMEKO XV World Congress, June 13-18, 1999, Osaka, Japan, Vol. IX: Measurement of Geometrical Quantities, pp. 63-69, ISBN 4-907764-08-1

Neuschaefer-Rube, U.; Holzapfel, W.; Doberitzsch, J.

Simultane optische Messung von Oberflächenform und Materialverteilung mit topometrischer Ellipsometrie
44th International Scientific Colloquium, Ilmenau, Sept. 20 - 23, 1999, Band 1: Vortragsreihen Prozessmess- und Sensortechnik, Oberflächen- und Lichtmesstechnik, Qualitätssicherung, PC-basierte Automatisierungssysteme, pp. 305-310, ISSN 0943-7207

Neuschaefer-Rube, U.; Doberitzsch, J.; Holzapfel, W.

Mikrostrukturmessung mit Ellipsotopometrie.
99. Tagungsband der Deutschen Gesellschaft für angewandte Optik, 2. – 6. Juni 1998, Bad Nenndorf, pp. 52

Doberitzsch, J.; Holzapfel, W.; Neuschaefer-Rube, U.

Microellipsometric surface measurements.
European Symposium on Lasers and Optics in Manufacturing, 16-20 June 1997, Munich, Proceedings SPIE Vol. 3098: Optical Inspections and Micromeasurements II, pp. 125-132, ISBN 0-8194-2518-4, ISSN 0277-786X

Neuschaefer-Rube, U; Holzapfel, W.; Doberitzsch, J.

Surface measurement using ellipsometry with high lateral resolution.
Proceedings XIV IMEKO World Congress, Tampere, Finland, 1-6 June 1997, Vol. VIII: Measurement of Geometrical Quantities, pp. 153-158, ISBN 952-5183-01-7, CD-ROM ISBN 951-96042-9-4

Holzapfel, W.; Neuschaefer-Rube, U.; Doberitzsch, J.

Ellipsometric Topometry for Technical Surfaces.
SPIE-Proceedings of the International Symposium on Polarization Analysis and Applications to Device Technology, 12-14 June 1996, Yokohama, Japan, Vol. 2873, pp. 172-175, ISBN 0-8194-2271-1

Further Activities in

GASFLOW DIAGNOSIS, PROCESS MEASUREMENT & CONTROL EQUIPMENT - GASFLUSSMESSUNG, PROZESSTECHNIK

Baetz, W.; Holzapfel; W.; Dietrich, H.; Nath, B.:

Beam configuration for light sheet application. Measurement 38, 2005, pp. 42-52

Nath, B.; Dietrich, H.; Baetz, W.; Holzapfel, W.;

High Speed Gas Flow Diagnosis with Semiconductor Lasers. Proceedings of IMEKO XV World Congress, June 13-18, 1999, Osaka, Japan, Vol. XI: Photonic Measurements, Measurement of Human Functions, pp. 25-32, ISBN 4-907764-10-3

Nath, B.; Löber, W; Baetz, W; Holzapfel, W.

Laser Light Sheet Imaging of Gas Flow with Laser Diodes Optical Diagnostics in Engineering 3, 1 (1999) pp. 102-109, ESSN 1364-4173

Nath, B.; Löber, W; Baetz, W.; Holzapfel, W.

Application of Laser Diodes to Gas Flow Diagnosis. Proceedings of the International Workshop on Flow Diagnosis Techniques, St. Petersburg, June 30-July 3, 1998, pp. 157-164, ISBN 5-7320-0514-5

Nath, B.; Löber, W; Baetz, W.; Holzapfel, W.

Gas Flow Visualization by Laser Diode Light Sheet Imaging Proceedings 9th International Symposium on Applications of Laser Techniques to Fluid Mechanics, Lisbon, Portugal, 1998, Vol. I, 6.2.1

Nath, B.; Löber, W.; Baetz, W.; Holzapfel, W.

Laser Light Sheet Imaging of Gas Flow with Laser Diodes. 8th International Symposium on Flow Visualization, Sorrento, Italy, Sept. 1-4, 1998, Printed Proceedings, pp. 99-102, ISBN 0953399109